Electrical Characterization of Metal-Ferroelectric- Insulator- Semiconductor having Double Layered Insulator for Memory Applications
نویسندگان
چکیده
Metal-ferroelectric-insulator-semiconductor (MFIS) devices were successfully fabricated using poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) and poly (methyl methacrylate): titanium dioxide (PMMA:TiO2) nanocomposite as ferroelectric and insulator films, respectively on n-type silicon (n-Si) substrate. Both ferroelectric and insulator films were prepared by sol-gel spin coating method. The electrical behaviour of metal-ferroelectric-metal (MFM) structure with PVDF-TrFE film and metal-insulatormetal (MIM) structure PMMA:TiO2 film exhibited different current characteristics. The capacitance of the MFIS devices was found to be 0.42 and 0.29 nF at frequency of 1kHz and 1 MHz respectively. Meanwhile, the dielectric loss values are constant (~60 x 10) in the frequency range from 100 Hz to 100 kHz. I-V results for MFIS are much higher than MIM and MFM is due to there is a trapped holes/electron located at the semiconductorinsulator interface which contributes to high leakage current in the MFIS device. We conclude, although interposing the PMMA :TiO2 nanocomposite insulator layer between the semiconductor and Al electrodes degrades the MFIS performance, nevertheless, they remain sufficiently good for use in organic electronic devices.
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